By default, the master (master.dat) and system procedures device (sybsytemprocs.dat) files are installed in the %SYBASE%\data directory. The device file names can be different than their device names.
Be sure that you have a \temp directory, and TEMP environment variable on the system. The installation program uses the directory to write files temporarily during the installation, which it locates via the TEMP environment variable. The program frees this space after installation is complete.